Die Oberflächenrauhigkeiten können um bis zu 60 Prozent gegenüber dem Standard reduziert werden.
Die Basis für diese Verbesserungen liegt in einer neuartigen Sputtertechnologie, dem cylindrical co-sputtern – C2. Szyszka und sein Team schießen nicht nur die üblichen Edelgasatome auf das Titan-Target, sondern zusätzlich Wismut-Atome.
www.ist.fraunhofer.deIn comparison with the standard, surface roughnesses have been reduced by up to 60 percent.
The basis for these improvements is to befound in a new kind of sputtering technology, cylindrical co-sputtering C2. Szyszka and his team do not shoot just the usual noble gas atoms at the titanium target but also bismuth atoms as well.
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