Verdampfungsprozesse, die mithilfe des Elektronenstrahles betrieben werden, sind zudem einfach skalierbar und beson- ders sauber.
In Strahlquellen der EasyBeam-Reihe wird die Kathode durch Ionen aus dem Plasma zur Elektronenemission angeregt.
Der Elektronenstrahl ist dadurch über den Gasdruck zur Erzeugung des Plasmas regelbar.
www.fep.fraunhofer.deFurthermore, electron beam-based evaporation processes can be easily scaled and are very clean.
In electron beam sources of the EasyBeam series, the electron emission from the cathode is stimulated by impinging plas- ma ions.
The electron beam can thus be simply adjusted by changing the pressure of the gas that produces the plasma.
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