Durchführung von Einzelprozessschritten und innovative Prozessentwicklung
Entwicklung von Oxidations- und Ausheilprozessen auf Silicium-, Siliciumcarbid- und Germaniumsubstraten
Herstellung und Charakterisierung neuer Gatekonzepte
www.leb.eei.uni-erlangen.deImplementation of customized single process steps and cutting-edge process devolopment
Development of oxidation and annealing processes on silicon, silicon carbide and germanium substrates
Fabrication and characterization of novel gate concepts
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